Restricted Research - Award List, Note/Discussion Page
Fiscal Year: 2023
2116 The University of Texas at Dallas (144004)
Principal Investigator: Cho,Kyeongjae
Total Amount of Contract, Award, or Gift (Annual before 2011): $ 391,500
Exceeds $250,000 (Is it flagged?): Yes
Start and End Dates: 1/1/23 - 12/31/23
Restricted Research: YES
Academic Discipline: Material Science Engineering
Department, Center, School, or Institute: ECS
Title of Contract, Award, or Gift: Conversion of HZO to a Low Voltage Ferroelectric and High k Dielectric
Name of Granting or Contracting Agency/Entity:
Semiconductor Research Corp
Program Title: none
Note:
To explore the doped HZO material properties, PIs propose a combined theory-experiment study on doped poly-crystallin HZO films with emphasis on their grain boundary properties. The effects of dopants in bulk HZO are demonstrated by PIs, but the dopants introduced by nanolaminate ALD will interact with the grain boundaries during the post-deposition anneal to transform the amorphous laminates to a poly-crystalline films.
Discussion: No discussion notes