Restricted Research - Award List, Note/Discussion Page
Fiscal Year: 2023
2127 The University of Texas at Dallas (144015)
Principal Investigator: Kim,Jiyoung
Total Amount of Contract, Award, or Gift (Annual before 2011): $ 300,000
Exceeds $250,000 (Is it flagged?): Yes
Start and End Dates: 12/1/22 - 11/30/25
Restricted Research: YES
Academic Discipline: Material Science Engineering
Department, Center, School, or Institute: ECS
Title of Contract, Award, or Gift: Atomic layer deposition (ALD) of In based nitride channel layer for 3-D stacked device applications.
Name of Granting or Contracting Agency/Entity:
SK Hynix
Program Title: none
Note:
In this project, we plan to conduct research on atomic layer doping (ALDo) technology. we aim to study the fundamental mechanism of ALDo and ultimately construct a ultra-thin channel layer through n- or p-type doping on oxide/nitride substrate. In addition, we would like to propose an atomic layer annealing (ALA) technique to solve the dopant activation problem. No publication restrictions
Discussion: No discussion notes